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1、第一页，共三十一页。第二页，共三十一页。第三页，共三十一页。第四页，共三十一页。RM660. 2XRMEXLCLXLineCenterRM660. 2XRMEXUCL220RMDLCLRMLineCenterRM268. 3RMDUCL34第五页，共三十一页。SNForce134.78235.29333.38436.54538.52639.32738.37837.17935.321036.981137.031237.151337.621437.761538.641633.801734.041836.161938.792037.682137.562238.132336.502435.172538

2、.732638.082736.652836.002936.613037.963139.213237.353335.143437.453535.213638.693734.843836.803936.564037.714135.344239.464338.404439.914534.404636.834735.164837.964937.455035.43第六页，共三十一页。第七页，共三十一页。5040302010Subgroup0423732Individual ValueMean=36.90UCL=41.41LCL=32.396543210Moving RangeR=1.695UCL=5.5

3、39LCL=0I and MR Chart for Force第八页，共三十一页。第九页，共三十一页。第十页，共三十一页。第十一页，共三十一页。第十二页，共三十一页。第十三页，共三十一页。第十四页，共三十一页。第十五页，共三十一页。1ARLControlIn21k第十六页，共三十一页。An Optimal Design of CUSUM Quality Control Charts by Gan FF, Journal of Quality Technology (Vol 23, No 4, Oct 1991), Source :第十七页，共三十一页。The data are thicknes

4、s measurements for a sputtered platinum layer. 4 wafers are measured for each shift and the values are averaged and compared to a target value of 250.第十八页，共三十一页。第十九页，共三十一页。第二十页，共三十一页。403020100-10-20-30-4038.5446-38.544620100Subgroup NumberCumulative SumUpper CUSUMLower CUSUMOne-side CUSUM chart for

5、platinum thickness第二十一页，共三十一页。第二十二页，共三十一页。第二十三页，共三十一页。500-5048.1807-48.180720100Subgroup NumberCumulative SumUpper CUSUMLower CUSUMOne-side CUSUM chart for platinum thickness第二十四页，共三十一页。第二十五页，共三十一页。第二十六页，共三十一页。Target ValueUpper Specification LimitLower Specification LimitUpper Pre-Control LimitLower

6、 Pre-Control LimitGreen ZoneYellow ZoneYellow ZoneRed ZoneRed ZoneHalf ToleranceFull Tolerance第二十七页，共三十一页。第二十八页，共三十一页。第二十九页，共三十一页。第三十页，共三十一页。内容(nirng)总结Statistical Process Control: Advanced Control Chart。Two-Sided (V-Mask) CUSUM。S/N XiXi-250(Xi-250)。Lower Pre-Control Limit。Control Chart Road-map。29第三十一页，共三十一页。

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